List of Mattson Technology patents

Patents where

Current Assignee

Name

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Mattson Technology

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 10037867 Inductive plasma source with high coupling efficiency	Patent 10037867 was granted and assigned to Mattson Technology on July, 2018 by the United States Patent and Trademark Office.	‌ Mattson Technology	‌ Mattson Technology	United States Patent and Trademark Office	10037867	July 31, 2018
‌ US Patent 9627244 Methods and systems for supporting a workpiece and for heat-treating the workpiece	Patent 9627244 was granted and assigned to Mattson Technology on April, 2017 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	9627244	April 18, 2017
‌ US Patent 7563068 Low cost high throughput processing platform	Patent 7563068 was granted and assigned to Mattson Technology on July, 2009 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7563068	July 21, 2009
‌ US Patent 9482468 Repeatable heat-treating methods and apparatus	Patent 9482468 was granted and assigned to Mattson Technology on November, 2016 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	9482468	November 1, 2016
‌ US Patent 7045746 Shadow-free shutter arrangement and method	Patent 7045746 was granted and assigned to Mattson Technology on May, 2006 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7045746	May 16, 2006
‌ US Patent 7232767 Slotted electrostatic shield modification for improved etch and CVD process uniformity	Patent 7232767 was granted and assigned to Mattson Technology on June, 2007 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7232767	June 19, 2007
‌ US Patent 9493306 Low cost high throughput processing platform	Patent 9493306 was granted and assigned to Mattson Technology on November, 2016 by the United States Patent and Trademark Office.	‌ Mattson Technology	‌ Mattson Technology	United States Patent and Trademark Office	9493306	November 15, 2016
‌ US Patent 8405005 Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate	Patent 8405005 was granted and assigned to Mattson Technology on March, 2013 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	8405005	March 26, 2013
‌ US Patent 9184072 Advanced multi-workpiece processing chamber	Patent 9184072 was granted and assigned to Mattson Technology on November, 2015 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	9184072	November 10, 2015
‌ US Patent 7745762 Optimizing the thermal budget during a pulsed heating process	Patent 7745762 was granted and assigned to Mattson Technology on June, 2010 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7745762	June 29, 2010
‌ US Patent 9653264 Inductively coupled plasma source for plasma processing	Patent 9653264 was granted and assigned to Mattson Technology on May, 2017 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	9653264	May 16, 2017
‌ US Patent 7276122 Multi-workpiece processing chamber	Patent 7276122 was granted and assigned to Mattson Technology on October, 2007 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7276122	October 2, 2007
‌ US Patent 6902622 Systems and methods for epitaxially depositing films on a semiconductor substrate	Patent 6902622 was granted and assigned to Mattson Technology on June, 2005 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	6902622	June 7, 2005
‌ US Patent 7115837 Selective reflectivity process chamber with customized wavelength response and method	Patent 7115837 was granted and assigned to Mattson Technology on October, 2006 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7115837	October 3, 2006
‌ US Patent 10431469 Method for high aspect ratio photoresist removal in pure reducing plasma	Patent 10431469 was granted and assigned to Mattson Technology on October, 2019 by the United States Patent and Trademark Office.	‌ Mattson Technology	‌ Mattson Technology	United States Patent and Trademark Office	10431469	October 1, 2019
‌ US Patent 8444870 Inductive plasma source with high coupling efficiency	Patent 8444870 was granted and assigned to Mattson Technology on May, 2013 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	8444870	May 21, 2013
‌ US Patent 7976216 Determining the temperature of silicon at high temperatures	Patent 7976216 was granted and assigned to Mattson Technology on July, 2011 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7976216	July 12, 2011
‌ US Patent 7654596 Endeffectors for handling semiconductor wafers	Patent 7654596 was granted and assigned to Mattson Technology on February, 2010 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7654596	February 2, 2010
‌ US Patent 8668383 Methods for determining wafer temperature	Patent 8668383 was granted and assigned to Mattson Technology on March, 2014 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	8668383	March 11, 2014
‌ US Patent 10403492 Integration of materials removal and surface treatment in semiconductor device fabrication	Patent 10403492 was granted and assigned to Mattson Technology on September, 2019 by the United States Patent and Trademark Office.	‌ Mattson Technology	‌ Mattson Technology	United States Patent and Trademark Office	10403492	September 3, 2019
‌ US Patent 9396963 Mask removal process strategy for vertical NAND device	Patent 9396963 was granted and assigned to Mattson Technology on July, 2016 by the United States Patent and Trademark Office.	‌ Mattson Technology	‌ Mattson Technology	United States Patent and Trademark Office	9396963	July 19, 2016
‌ US Patent 7358462 Apparatus and method for reducing stray light in substrate processing chambers	Patent 7358462 was granted and assigned to Mattson Technology on April, 2008 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7358462	April 15, 2008
‌ US Patent 7135656 Apparatus and method for reducing stray light in substrate processing chambers	Patent 7135656 was granted and assigned to Mattson Technology on November, 2006 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	7135656	November 14, 2006
‌ US Patent 10269574 Surface treatment of carbon containing films using organic radicals	Patent 10269574 was granted and assigned to Mattson Technology on April, 2019 by the United States Patent and Trademark Office.	‌ Mattson Technology	‌ Mattson Technology	United States Patent and Trademark Office	10269574	April 23, 2019
‌ US Patent 8434341 Methods and systems for supporting a workpiece and for heat-treating the workpiece	Patent 8434341 was granted and assigned to Mattson Technology on May, 2013 by the United States Patent and Trademark Office.		‌ Mattson Technology	United States Patent and Trademark Office	8434341	May 7, 2013

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