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US Patent 10546724 Pulsed, bidirectional radio frequency source/load

Patent 10546724 was granted and assigned to MKS Instruments on January, 2020 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
MKS Instruments
MKS Instruments
Date Filed
May 9, 2018
Date of Patent
January 28, 2020
Patent Applicant
MKS Instruments
MKS Instruments
Patent Application Number
15974947
Patent Citations Received
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US Patent 12131884 Pulse and bias synchronization methods and systems
0
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US Patent 11996269 Extremum seeking control apparatuses with online parameter adjustment and methods
0
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US Patent 12068725 Switched capacitor modulator
0
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US Patent 12087549 Demagnetizing coils for linearity improvement of current ratio of plasma processing systems
0
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US Patent 11527384 Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
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US Patent 11536755 System and method for arc detection using a bias RF generator signal
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US Patent 11545943 Switched capacitor modulator
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US Patent 10886105 Impedance matching method, impedance matching device and plasma generating apparatus
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US Patent 10991550 Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
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US Patent 11594397 Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10546724
Patent Primary Examiner
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Monica C King

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