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US Patent 12068725 Switched capacitor modulator

Patent 12068725 was granted and assigned to MKS Instruments on August, 2024 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
MKS Instruments
MKS Instruments
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Current Assignee
MKS Instruments
MKS Instruments
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
120687250
Patent Inventor Names
Albert Kuramshin0
Aaron Radomski0
Duy Nguyen0
Kelvin Lee0
Alexander Jurkov0
Hangon Kim0
Date of Patent
August 20, 2024
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Patent Application Number
179934980
Date Filed
November 23, 2022
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Patent Citations
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US Patent 10049857 Adaptive periodic waveform controller
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US Patent 10546724 Pulsed, bidirectional radio frequency source/load
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US Patent 11545943 Switched capacitor modulator
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US Patent 10821542 Pulse synchronization by monitoring power in another frequency band
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US Patent 7602127 Phase and frequency control of a radio frequency generator from an external source
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US Patent 8110991 Phase and frequency control of a radio frequency generator from an external source
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US Patent 8395322 Phase and frequency control of a radio frequency generator from an external source
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US Patent 9748864 Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits
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Patent Primary Examiner
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Henry Choe
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CPC Code
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H03F 1/30
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Patent abstract

A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

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