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US Patent 9269468 X-ray beam conditioning

Patent 9269468 was granted and assigned to Jordan Valley Semiconductors on February, 2016 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
Jordan Valley Semiconductors
Jordan Valley Semiconductors
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Current Assignee
Jordan Valley Semiconductors
Jordan Valley Semiconductors
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
92694680
Patent Inventor Names
John Leonard Wall0
John Spence0
Paul Anthony Ryan0
Date of Patent
February 23, 2016
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Patent Application Number
138721960
Date Filed
April 29, 2013
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Patent Citations Received
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US Patent 11781999 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
Patent Primary Examiner
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Allen C. Ho
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Patent abstract

An X-ray optical device includes a crystal containing a channel, which passes through the crystal and has multiple internal faces. A mount is configured to hold the crystal in a fixed location relative to a source of an X-ray beam and to shift the crystal automatically between two predefined dispositions: a first disposition in which the X-ray beam passes through the channel while diffracting from one or more of the internal faces, and a second disposition in which the X-ray beam passes through the channel without diffraction by the crystal.

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