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US Patent 9269468 X-ray beam conditioning

Patent 9269468 was granted and assigned to Jordan Valley Semiconductors on February, 2016 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
Jordan Valley Semiconductors
Jordan Valley Semiconductors
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Date Filed
April 29, 2013
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Date of Patent
February 23, 2016
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Patent Applicant
Jordan Valley Semiconductors
Jordan Valley Semiconductors
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Patent Application Number
13872196
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Patent Citations Received
‌
US Patent 11781999 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
Patent Inventor Names
John Leonard Wall
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John Spence
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Paul Anthony Ryan
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
9269468
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Patent Primary Examiner
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Allen C. Ho
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