Log in
Enquire now
‌

US Patent 7764140 Radio frequency power delivery system

Patent 7764140 was granted and assigned to MKS Instruments on July, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors

Contents

Is a
Patent
Patent
0

Patent attributes

Current Assignee
MKS Instruments
MKS Instruments
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
77641400
Patent Inventor Names
John A. Smith0
Ali Shajii0
Daniel Goodman0
Ilya Bystryak0
Michael Kishinevsky0
Siddharth P. Nagarkatti0
Timothy E. Kalvaitis0
William M. Holber0
...
Date of Patent
July 27, 2010
0
Patent Application Number
115549790
Date Filed
October 31, 2006
0
Patent Citations Received
‌
US Patent 11887812 Bias supply with a single controlled switch
0
‌
US Patent 11888468 Tuning capacitance to enhance FET stack voltage withstand
0
‌
US Patent 11942309 Bias supply with resonant switching
0
‌
US Patent 11948775 Combined RF generator and RF solid-state matching network
0
‌
US Patent 11671091 Devices and methods for improving voltage handling and/or bi-directionality of stacks of elements when connected between terminals
0
‌
US Patent 11978613 Transition control in a bias supply
0
0
‌
US Patent 12125674 Surface charge and power feedback and control using a switch mode bias system
0
...
Patent Primary Examiner
Douglas W Owens
Douglas W Owens
0
Patent abstract

A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

Timeline

No Timeline data yet.

Further Resources

Title
Author
Link
Type
Date
No Further Resources data yet.

References

Find more entities like US Patent 7764140 Radio frequency power delivery system

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo

Company

  • Home
  • Press & Media
  • Blog
  • Careers
  • WE'RE HIRING

Products

  • Knowledge Graph
  • Query Tool
  • Data Requests
  • Knowledge Storage
  • API
  • Pricing
  • Enterprise
  • ChatGPT Plugin

Legal

  • Terms of Service
  • Enterprise Terms of Service
  • Privacy Policy

Help

  • Help center
  • API Documentation
  • Contact Us
By using this site, you agree to our Terms of Service.