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US Patent 7764140 Radio frequency power delivery system

Patent 7764140 was granted and assigned to MKS Instruments on July, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
MKS Instruments
MKS Instruments
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Date Filed
October 31, 2006
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Date of Patent
July 27, 2010
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Patent Application Number
11554979
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Patent Citations Received
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US Patent 11887812 Bias supply with a single controlled switch
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US Patent 11888468 Tuning capacitance to enhance FET stack voltage withstand
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US Patent 11942309 Bias supply with resonant switching
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US Patent 11948775 Combined RF generator and RF solid-state matching network
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US Patent 11671091 Devices and methods for improving voltage handling and/or bi-directionality of stacks of elements when connected between terminals
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US Patent 11978613 Transition control in a bias supply
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US Patent 12125674 Surface charge and power feedback and control using a switch mode bias system
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US Patent 11670487 Bias supply control and data processing
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US Patent 11842884 Spatial monitoring and control of plasma processing environments
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Patent Inventor Names
John A. Smith
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Ali Shajii
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Daniel Goodman
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Ilya Bystryak
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Michael Kishinevsky
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Siddharth P. Nagarkatti
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Timothy E. Kalvaitis
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William M. Holber
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William S. McKinney, Jr.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7764140
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Patent Primary Examiner
Douglas W Owens
Douglas W Owens
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