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US Patent 7653174 Inspection of small features using X-ray fluorescence

Patent 7653174 was granted and assigned to Jordan Valley Semiconductors on January, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
Jordan Valley Semiconductors
Jordan Valley Semiconductors
Date Filed
December 20, 2007
Date of Patent
January 26, 2010
Patent Application Number
12003215
Patent Citations Received
‌
US Patent 11781999 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7653174
Patent Primary Examiner
‌
Edward J. Glick

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