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US Patent 7183547 Element-specific X-ray fluorescence microscope and method of operation

Patent 7183547 was granted and assigned to Xradia on February, 2007 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
‌
Xradia
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7183547
Date of Patent
February 27, 2007
Patent Application Number
10995642
Date Filed
November 23, 2004
Patent Citations Received
‌
US Patent 11992350 System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
0
‌
US Patent 11686692 High throughput 3D x-ray imaging system using a transmission x-ray source
0
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US Patent 11885755 X-ray sequential array wavelength dispersive spectrometer
0
Patent Primary Examiner
‌
NIkita Wells
Patent abstract

An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used. This enhances the preferential imaging of the zone plate lens because its diffraction efficiency (percent of incident energy diffracted into the focus) changes rapidly near an absorption line and can be made to peak at the X-ray fluorescence line of the element from which it is fabricated. In another embodiment, a spectral filter, such as a multilayer optic or crystal, is used in the optical train to achieve preferential imaging in a fluorescence microscope employing either a chromatic or an achromatic lens.

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