Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wenbing Yun0
Date of Patent
August 22, 2006
0Patent Application Number
111916110
Date Filed
July 28, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.
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