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US Patent 11563420 Femto-tesla MEMS RF antenna with integrated flux concentrator

Patent 11563420 was granted and assigned to Hrl Laboratories, Llc on January, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Hrl Laboratories, Llc
Hrl Laboratories, Llc
Current Assignee
Hrl Laboratories, Llc
Hrl Laboratories, Llc
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11563420
Date of Patent
January 24, 2023
Patent Application Number
16775242
Date Filed
January 28, 2020
Patent Citations
‌
US Patent 10266398 ALD metal coatings for high Q MEMS structures
‌
US Patent 10308505 Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
‌
US Patent 10585150 Magnetic field detector system
‌
US Patent 10389392 High-Q quartz-based inductor array for antenna matching
‌
US Patent 10031191 Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
‌
US Patent 10110198 Integrated quartz MEMS tuning fork resonator/oscillator
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US Patent 10126376 Quartz magnetometer having a quartz resonant plate with a broaden distal end for enhanced magnetic sensitivity
‌
US Patent 10175307 FM demodulation system for quartz MEMS magnetometer
...
Patent Citations Received
‌
US Patent 11988727 Magnetostrictive MEMS magnetic gradiometer
0
‌
US Patent 11791566 Extremely electrically small antennas based on multiferroic materials
Patent Primary Examiner
‌
J. San Martin
CPC Code
‌
H01Q 13/10
‌
H03H 9/173
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H03H 9/22
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H03H 9/19
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H01L 41/125

A RF antenna or sensor has a substrate, a resonator operable at UHF disposed on the substrate, the resonator preferably having a quartz bar or body with electrodes disposed on opposing major surfaces thereof and with a magnetostrictive material disposed on or covering at least one of the electrodes. A pair of trapezoidal, triangular or wing shaped high permeability pole pieces preferably supported by that substrate are disposed confronting the resonator, one of the pair being disposed one side of the resonator and the other one of the pair being disposed on an opposing side of said resonator, the pair of high permeability pole pieces being spaced apart by a gap G, the resonator being disposed within that gap G. The size of gap G is preferably less than 100 μm.

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