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US Patent 10389392 High-Q quartz-based inductor array for antenna matching

Patent 10389392 was granted and assigned to Hrl Laboratories, Llc on August, 2019 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Hrl Laboratories, Llc
Hrl Laboratories, Llc
Current Assignee
Hrl Laboratories, Llc
Hrl Laboratories, Llc
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10389392
Date of Patent
August 20, 2019
Patent Application Number
15801642
Date Filed
November 2, 2017
Patent Citations Received
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US Patent 11988727 Magnetostrictive MEMS magnetic gradiometer
0
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US Patent 11863154 Non-linear tethers for suspended devices
0
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US Patent 11863194 Phononic comb enhanced atomic clock
0
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US Patent 11942423 Series inductors
0
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US Patent 10581402 Integrated quartz MEMS tuning fork resonator/oscillator
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US Patent 11239823 Quartz MEMS piezoelectric resonator for chipscale RF antennae
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US Patent 11563420 Femto-tesla MEMS RF antenna with integrated flux concentrator
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US Patent 10819276 Broadband integrated RF magnetic antenna
...
Patent Primary Examiner
‌
Nhan T Le
Patent abstract

A resonator is formed from a unitary slab of a plate of quartz material which is KT cut with a theta cut angle between 20 and 35 degree, the unitary slab of a plate of quartz material having vertical side walls defining (i) an elongated central portion, the elongated central portion having a centerline along its major dimension, the elongated central portion resonating, in use, in an extensional mode disposed at a right angle to said centerline, (ii) a pair of isolating springs integrally connected to said central portion at the centerline thereof and (iii) first and second pairs of tethers, each one of the pairs tethers being integrally connected at a mid point of each the first and second pairs of tethers to ends of the isolating springs remote from the elongated central portion, each of the pairs tethers having two arms which wrap around the elongated central portion so that an end of one arm of the one of the tether approaches, but does not contact, an end of an arm of the another one of the tethers. The elongated central portion has two major opposing surfaces with a first pair of parallel electrodes disposed on one of the two opposing surfaces and with a second pair of parallel electrodes disposed on the other one of the two opposing surfaces. Interconnecting conductors disposed on the elongated central portion, on the isolating springs and on the first and second tethers, interconnecting conductors electrically connecting the first and second electrodes with pads located at the ends of the arms of said tethers.

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