US Patent 10591525 Wafer metrology technologies
Patent 10591525 was granted and assigned to Femtometrix, Inc. on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 7, 2017
0
Date of Patent
March 17, 2020
0
Patent Applicant
Patent Application Number
15806271
0
Patent Citations Received
Patent Inventor Names
John Changala
0
Marc Kryger
0
Viktor Koldiaev
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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