Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
John Changala0
Marc Kryger0
Viktor Koldiaev0
Date of Patent
March 17, 2020
0Patent Application Number
158062710
Date Filed
November 7, 2017
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Various approaches can be used to interrogate a surface such as a surface of a layered semiconductor structure on a semiconductor wafer. Certain approaches employ Second Harmonic Generation and in some cases may utilize pump and probe radiation. Other approaches involve determining current flow from a sample illuminated with radiation. Decay constants can be measured to provide information regarding the sample. Additionally, electric and/or magnetic field biases can be applied to the sample to provide additional information.
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