Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshihiro Kachi0
Shogo Onishi0
Takahiro Umeda0
Takeshi Yoshikawa0
Date of Patent
November 29, 2016
Patent Application Number
14440216
Date Filed
September 30, 2013
Patent Primary Examiner
Patent abstract
[Problem] Provided is a polishing composition that can sufficiently maintain a high polishing rate for a barrier layer and an insulating film and suppress the occurrence of a surface defect such as erosion or fang.
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