Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuto Ishida0
Shogo Onishi0
Tatsuhiko Hirano0
Date of Patent
November 8, 2016
Patent Application Number
14440208
Date Filed
October 29, 2013
Patent Primary Examiner
Patent abstract
[Problem] Provided is a polishing composition which is suitable for polishing a polishing object having a metal wiring layer and capable of diminishing the step defect while maintaining a high polishing rate.
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