US Patent 9425376 Plasma cleaning of superconducting layers
Patent 9425376 was granted and assigned to Intermolecular (company) on August, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 23, 2013
Date of Patent
August 23, 2016
Patent Applicant
Patent Application Number
14138672
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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