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US Patent 9335636 Method of patterning a device

Patent 9335636 was granted and assigned to Orthogonal, Inc. on May, 2016 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Patent Applicant
‌
Orthogonal, Inc.
Current Assignee
‌
Orthogonal, Inc.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9335636
Date of Patent
May 10, 2016
Patent Application Number
14808194
Date Filed
July 24, 2015
Patent Primary Examiner
‌
Caleen Sullivan
Patent abstract

A photopolymer layer is formed on an organic device substrate and exposed to patterned radiation. The photopolymer layer includes a photopolymer comprising at least a first repeating unit having an acid-catalyzed, solubility-altering reactive group, wherein the total fluorine content of the photopolymer is less than 30% by weight. The pattern exposed photopolymer is contacted with a developing agent, such as a developing solution, to remove unexposed photopolymer, thereby forming a developed structure having a first pattern of exposed photopolymer covering the substrate and a complementary second pattern of uncovered substrate corresponding to the unexposed photopolymer. The developing agent comprises at least 50% by volume of a hydrofluoroether developing solvent.

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