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US Patent 9032818 Microelectromechanical load sensor and methods of manufacturing the same

Patent 9032818 was granted and assigned to NextInput on May, 2015 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
NextInput
NextInput
0
Current Assignee
NextInput
NextInput
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
90328180
Patent Inventor Names
Ryan Diestelhorst0
Ian Campbell0
Date of Patent
May 19, 2015
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Patent Application Number
139349000
Date Filed
July 3, 2013
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Patent Citations Received
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US Patent 11874185 Force attenuator for force sensor
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US Patent 11946816 Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
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US Patent 11946817 Integrated digital force sensors and related methods of manufacture
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US Patent 11754451 Integrated piezoresistive and piezoelectric fusion force sensor
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US Patent 11752247 Blood treatment systems
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US Patent 11925736 Blood treatment systems
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Patent Primary Examiner
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Lisa Caputo
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Patent abstract

A microelectromechanical (“MEMS”) load sensor device for measuring a force applied by a human user is described herein. In one aspect, the load sensor device has a contact surface in communication with a touch surface which communicates forces originating on the touch surface to a deformable membrane, on which load sensor elements are arranged, such that the load sensor device produces a signal proportional to forces imparted by a human user along the touch surface. In another aspect, the load sensor device has an overload protection ring to protect the load sensor device from excessive forces. In another aspect, the load sensor device has embedded logic circuitry to allow a microcontroller to individually address load sensor devices organized into an array. In another aspect, the load sensor device has electrical and mechanical connectors such as solder bumps designed to minimize cost of final component manufacturing.

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