US Patent 8755165 Fault tolerant ion source power system
Patent 8755165 was granted and assigned to Veeco on June, 2014 by the United States Patent and Trademark Office.
Is a
Date Filed
October 18, 2010
Date of Patent
June 17, 2014
Patent Application Number
12906756
Patent Citations Received
Patent Inventor Names
Curtis Charles Camus
0
Dennis John Hansen
0
James David Deakins
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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