Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ye Wang0
Dongmin Chen0
William Spencer Worley, III0
Xiao Yang0
Date of Patent
March 1, 2011
0Patent Application Number
120198220
Date Filed
January 25, 2008
0Patent Primary Examiner
Patent abstract
A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
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