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US Patent 7700483 Method for fabricating pixel structure

Patent 7700483 was granted and assigned to AU Optronics on April, 2010 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Current Assignee
AU Optronics
AU Optronics
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
77004830
Patent Inventor Names
Yi-Sheng Cheng0
Chia-Chi Tsai0
Date of Patent
April 20, 2010
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Patent Application Number
121269400
Date Filed
May 26, 2008
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Patent Primary Examiner
‌
Caridad M. Everhart
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Patent abstract

A method for fabricating a pixel structure is provided. First, a substrate having an active device formed thereon is provided. The active device has a gate, a gate dielectric layer, and a semiconductor layer having a channel, a source, and a drain region. Then, a dielectric layer is formed to cover the active device, and a photo-resist layer having a first photo-resist block and a second photo-resist block thinner than the first photo-resist block is formed on the dielectric layer. The second photo-resist block has openings above the source and the drain region, respectively. The source and the drain regions are exposed by removing part of the dielectric layer with the photo-resist layer as a mask. A second metal layer is formed after removing the second photo-resist block. A source and a drain are formed after removing the first photo-resist block. A pixel electrode connected to the drain is formed.

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