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US Patent 7541898 High isolation tunable MEMS capacitive switch

Patent 7541898 was granted and assigned to Regents of the University of California on June, 2009 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
Regents of the University of California
Regents of the University of California
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
75418980
Patent Inventor Names
Mark Bachman0
Guann-Pyng Li0
Hung-Pin Chang0
Jiangyuan Qian0
Bedri A. Cetiner0
Franco DeFlaviis0
Date of Patent
June 2, 2009
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Patent Application Number
118499140
Date Filed
September 4, 2007
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Patent Primary Examiner
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Dean O Takaoka
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Patent abstract

The systems and methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrodes over a transmission line. A first insulator can be located between one of the electrodes and the deflectable member to form a capacitive element. The deflectable member can be deflectable between an up-state and a down-state, the down-state capacitively coupling the deflectable member with the transmission line. The degree by which the deflectable member overlaps the first insulator can be adjusted to adjust the capacitance of the capacitive element and the resulting resonant frequency.

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