Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Isaac Mazor0
Boris Yokhin0
Date of Patent
January 27, 2009
0Patent Application Number
114874330
Date Filed
July 17, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.
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