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US Patent 7368387 Polishing composition and polishing method

Patent 7368387 was granted and assigned to Fujimi on May, 2008 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
‌
Fujimi
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
73683870
Patent Inventor Names
Hiroyasu Sugiyama0
Toshiki Owaki0
Takanori Uno0
Date of Patent
May 6, 2008
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Patent Application Number
110205450
Date Filed
December 22, 2004
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Patent Primary Examiner
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Binh X Tran
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Patent abstract

A polishing composition includes fumed alumina, alumina other than fumed alumina, colloidal silica, a first organic acid, a second organic acid, an oxidizing agent, and water. When the second organic acid is citric acid, the first organic acid is preferably malic acid, while when the second organic acid is malic acid, the first organic acid is preferably citric acid. When the second organic acid is succinic acid, iminodiacetic acid, itaconic acid, maleic acid, malonic acid, crotonic acid, gluconic acid, glycolic acid, lactic acid, or mandelic acid, the first organic acid is preferably either citric acid or malic acid. The polishing composition can be suitably used for polishing the surface of a substrate for a magnetic disk.

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