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US Patent 7365857 Precompensation of polarization errors in heterodyne interferometry

Patent 7365857 was granted and assigned to Zygo on April, 2008 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
Zygo
Zygo
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
73658570
Patent Inventor Names
Andrew Eric Carlson0
Michael Lowell Holmes0
Date of Patent
April 29, 2008
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Patent Application Number
112557660
Date Filed
October 21, 2005
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Patent Primary Examiner
‌
Patrick Connolly
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Patent abstract

Apparatus and methods for adjusting the polarizations of the components of an input beam to reduce leakage caused by imperfections in an interferometer are disclosed. The apparatus includes an interferometer positioned to receive an input beam that includes two components having different frequencies and different polarizations, the interferometer including a polarizing beam splitter positioned to spatially separate the input beam into two intermediate beams, the first intermediate beam corresponding to the first component and the second intermediate beam corresponding to the second component, where imperfections in the interferometer cause leakage of one of the components into the intermediate beam corresponding to the other of the components. The apparatus further includes a polarization compensator that includes at least one retardation plate positioned to adjust the polarizations of the components of the input beam to reduce the leakage caused by the imperfections in the interferometer.

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