Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Henry A. Hill0
Date of Patent
January 22, 2008
Patent Application Number
10659103
Date Filed
September 9, 2003
Patent Primary Examiner
Patent abstract
In general, in one aspect, the invention features a method for determining the location of an alignment mark on a stage including measuring a location, x1, of a stage along a first measurement axis using an interferometer, measuring a location, x2, of the stage along a second measurement axis substantially parallel to the first measurement axis, and determining a location of the alignment mark along a third axis substantially parallel to the first measurement axis based on x1, x2, and a correction term, ψ3, calculated from predetermined information including information characterizing imperfections in the interferometer.
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