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US Patent 7271102 Method of etching uniform silicon layer

Patent 7271102 was granted and assigned to AU Optronics on September, 2007 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Current Assignee
AU Optronics
AU Optronics
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Date Filed
June 20, 2003
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Date of Patent
September 18, 2007
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Patent Application Number
10600377
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Patent Inventor Names
Chien-Chou Hou
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Ching-Te Huang
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Li-Wei Hwang
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Shih-Kun Chen
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7271102
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Patent Primary Examiner
‌
Duy-Vu N Deo
0

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