Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 13, 2007
0Patent Application Number
100982220
Date Filed
March 14, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Pathways to rapid and reliable fabrication of three-dimensional nanostructures are provided. Simple methods are described for the production of well-ordered, multilevel nanostructures. This is accomplished by patterning block copolymer templates with selective exposure to a radiation source. The resulting multi-scale lithographic template can be treated with post-fabrication steps to produce multilevel, three-dimensional, integrated nanoscale media, devices, and systems.
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