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US Patent 7136162 Alignment of ellipsometer beam to sample surface

Patent 7136162 was granted and assigned to J.A. Woollam Co., Inc. on November, 2006 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors

Is a

Patent

Patent attributes

Current Assignee

J.A. Woollam Co., Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

71361620

Patent Inventor Names

Steven E. Green0

Galen L. Pfeiffer0

Martin M. Liphardt0

Ping He0

Brian D. Guenther0

Craig M. Herzinger0

Date of Patent

November 14, 2006

Patent Application Number

106840880

Date Filed

October 12, 2003

Patent Primary Examiner

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Gregory J. Toatley, Jr

Patent abstract

Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.