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US Patent 6984198 Experiment management system, method and medium

Patent 6984198 was granted and assigned to Applied Materials on January, 2006 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Current Assignee
Applied Materials
Applied Materials
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
69841980
Patent Inventor Names
Badri N. Krishnamurthy0
Parris C. M. Hawkins0
Date of Patent
January 10, 2006
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Patent Application Number
099284740
Date Filed
August 14, 2001
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Patent Citations Received
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US Patent 11978613 Transition control in a bias supply
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US Patent 11887812 Bias supply with a single controlled switch
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US Patent 11942309 Bias supply with resonant switching
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US Patent 12125674 Surface charge and power feedback and control using a switch mode bias system
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US Patent 11842884 Spatial monitoring and control of plasma processing environments
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Patent Primary Examiner
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John F. Niebling
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Patent abstract

Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An “experiment” may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment.

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