Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Erten Eser0
Gregory M. Hanket0
Date of Patent
January 3, 2006
0Patent Application Number
104356370
Date Filed
May 9, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material.
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