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US Patent 11802784 Single heater MEMS-CMOS based flow sensor

Patent 11802784 was granted and assigned to King Faisal University on October, 2023 by the United States Patent and Trademark Office.

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Is a
Patent
Patent

Patent attributes

Patent Applicant
King Faisal University
King Faisal University
Current Assignee
King Faisal University
King Faisal University
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11802784
Patent Inventor Names
Alaaedeen R. Abuzir
Mohd Al Saleh Al Othoum
Saed Amin Salman
Date of Patent
October 31, 2023
Patent Application Number
18142704
Date Filed
May 3, 2023
Patent Citations
‌
US Patent 10739175 Microflow sensor and flow sensor package
‌
US Patent 8356514 Sensor with improved thermal stability
‌
US Patent 11525721 Microflow sensor and method of making the same
Patent Primary Examiner
‌
Paul M. West
CPC Code
‌
G01F 1/69
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G01F 1/692
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G01F 1/6888
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G01F 1/6845
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G01F 1/7044
Patent abstract

A Wheatstone bridge flowmeter is formed on a base substrate with a fluid passageway formed over or through a top surface of the base substrate. Resistors forming the Wheatstone bridge and a heater are arranged in a linear physical arrangement along the passageway, such that two resistors on one side of the Wheatstone bridge are sequentially upstream of the heater and two resistors on the other side of the Wheatstone bridge are sequentially downstream of the heater, establishing a sequential arrangement along the fluid passageway of two of the resistors, the heater and the other two resistors. Heating of the fluid by the heater creates a differential in the temperatures of the resistors, thereby changing the output sensing voltages across the Wheatstone bridge.

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