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US Patent 11621333 Gate contact structure for a transistor device

Patent 11621333 was granted and assigned to GlobalFoundries on April, 2023 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
0

Patent attributes

Patent Applicant
GlobalFoundries
GlobalFoundries
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Current Assignee
GlobalFoundries
GlobalFoundries
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116213330
Patent Inventor Names
Ruilong Xie0
Mark V. Raymond0
Lars W. Liebmann0
Hao Tang0
Daniel Chanemougame0
Cheng Chi0
Date of Patent
April 4, 2023
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Patent Application Number
165557340
Date Filed
August 29, 2019
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Patent Primary Examiner
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Sheng-Bai Zhu
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CPC Code
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H01L 23/535
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H01L 27/0924
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H01L 21/76805
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H01L 21/76895
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H01L 29/66795
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H01L 29/45
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H01L 29/0847
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H01L 29/41775
0
...

One illustrative transistor device disclosed herein includes, among other things, a gate positioned above a semiconductor substrate, the gate comprising a gate structure, a conductive source/drain metallization structure positioned adjacent the gate, the conductive source/drain metallization structure having a front face, and an insulating spacer that is positioned on and in contact with at least a portion of the front face of the conductive source/drain metallization structure. In this example, the device also includes a gate contact opening that exposes at least a portion of the insulating spacer and a portion of an upper surface of the gate structure and a conductive gate contact structure positioned in the gate contact opening, wherein the conductive gate contact structure contacts at least a portion of the insulating spacer and wherein the conductive gate contact structure is conductively coupled to the gate structure.

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