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US Patent 10468277 Treatment apparatus for treating a surface of a body

Patent 10468277 was granted and assigned to LEVITRONIX, LLC on November, 2019 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Current Assignee
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LEVITRONIX, LLC
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
104682770
Patent Inventor Names
Reto Schoeb0
Date of Patent
November 5, 2019
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Patent Application Number
130454370
Date Filed
March 10, 2011
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Patent Citations Received
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US Patent 11458512 Systems and methods for rotating and translating a substrate in a process chamber
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US Patent 11476129 Translating and rotating chuck for processing microelectronic substrates in a process chamber
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US Patent 11545387 Magnetic integrated lift pin system for a chemical processing chamber
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US Patent 10850365 Polishing apparatus with a waste liquid receiver
Patent Primary Examiner
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Sylvia MacArthur
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Patent abstract

The invention relates to a treatment apparatus (1) for treating a surface (21) of a body (2) with a first treatment medium (31) and a second treatment medium (32). In this respect, the treatment apparatus (1) includes a holding device (5) rotatable about an axis of rotation (4) for receiving and holding the body (2) and a rotary drive (6) rotationally fixedly coupled to the rotatable holding device (5) as well as a supply device (7) for supplying the first treatment medium (31) and the second treatment medium (32) to the surface (21) of the body (2) held in the holding device (5). The treatment apparatus includes a collection container (8) having a separation element (80) which separation element (80) divides the collection container (8) into a first chamber (81) and into a second chamber (82) such that the first treatment medium (31) can be collected in the first chamber (81) and the second treatment medium (32) can be collected separately in the second chamber (82). In accordance with the invention, the collection container (8) includes a base chamber part (800) not movable with respect to the holding device (5) and the separation element (80) is movably arranged between a first position (A) and a second position (B) such that the first treatment medium (31) can be led off into the first chamber (81) in the first position (A) and the second treatment medium (32) can be led off into the second chamber (82) in the second position (B).

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