Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shuugo Yokota0
Yasuyuki Yamato0
Tomohiko Akatsuka0
Yukinobu Yoshizaki0
Yoshihiro Izawa0
Chiaki Saito0
Koichi Sakabe0
Shota Suzuki0
Date of Patent
December 4, 2018
0Patent Application Number
151293260
Date Filed
January 30, 2015
0Patent Primary Examiner
Patent abstract
The purpose of the present invention is to provide a means to sufficiently remove impurities remaining on the surface of a polishing object after CMP.
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