Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vijay Parkhe0
Konstantin Makhratchev0
Date of Patent
September 18, 2018
0Patent Application Number
142825030
Date Filed
May 20, 2014
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An electrostatic chuck is described with independent zone cooling that leads to reduced crosstalk. In one example, the chuck includes a puck to carry a substrate for fabrication processes, and a cooling plate fastened to and thermally coupled to the ceramic puck, the cooling plate having a plurality of different independent cooling channels to carry a heat transfer fluid to transfer heat from the cooling plate.
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