US Patent 10006000 Particle manipulation system with out-of-plane channel using axial light loss

A particle manipulation system uses a MEMS-based, microfabricated particle manipulation device which has an inlet channel, output channels, and a movable member formed on a substrate. The movable member moves parallel to the fabrication plane, as does fluid flowing in the inlet channel. The movable member separates a target particle from the rest of the particles, diverting it into an output channel. The target particles may be identified by a marker-free signal such as axial light loss to identify highly pigmented particles.