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List of Zetetic Limited patents

List of Zetetic Limited patents
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Patents where
Current Assignee
Name
is
‌
Zetetic Limited
Name
Description
Patent Applicant
Current Assignee
Inventor
Patent Jurisdiction
Patent Number
Date of Patent
‌
US Patent 7495769 Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry

Patent 7495769 was granted and assigned to Zetetic Limited on February, 2009 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7495769
February 24, 2009
‌
US Patent 7099014 Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry

Patent 7099014 was granted and assigned to Zetetic Limited on August, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7099014
August 29, 2006
‌
US Patent 7428058 Apparatus and method for in situ and ex situ measurements of optical system flare

Patent 7428058 was granted and assigned to Zetetic Limited on September, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7428058
September 23, 2008
‌
US Patent 7133139 Longitudinal differential interferometric confocal microscopy

Patent 7133139 was granted and assigned to Zetetic Limited on November, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7133139
November 7, 2006
‌
US Patent 7324209 Apparatus and method for ellipsometric measurements with high spatial resolution

Patent 7324209 was granted and assigned to Zetetic Limited on January, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7324209
January 29, 2008
‌
US Patent 7180604 Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces

Patent 7180604 was granted and assigned to Zetetic Limited on February, 2007 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7180604
February 20, 2007
‌
US Patent 7145663 Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces

Patent 7145663 was granted and assigned to Zetetic Limited on December, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7145663
December 5, 2006
‌
US Patent 7460245 Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry

Patent 7460245 was granted and assigned to Zetetic Limited on December, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7460245
December 2, 2008
‌
US Patent 7405832 Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry

Patent 7405832 was granted and assigned to Zetetic Limited on July, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7405832
July 29, 2008
‌
US Patent 7355722 Catoptric and catadioptric imaging systems with adaptive catoptric surfaces

Patent 7355722 was granted and assigned to Zetetic Limited on April, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7355722
April 8, 2008
‌
US Patent 7324216 Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers

Patent 7324216 was granted and assigned to Zetetic Limited on January, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7324216
January 29, 2008
‌
US Patent 7345771 Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks

Patent 7345771 was granted and assigned to Zetetic Limited on March, 2008 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7345771
March 18, 2008
‌
US Patent 7646490 Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase shifting point-diffraction interferometry

Patent 7646490 was granted and assigned to Zetetic Limited on January, 2010 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7646490
January 12, 2010
‌
US Patent 7164480 Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy

Patent 7164480 was granted and assigned to Zetetic Limited on January, 2007 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7164480
January 16, 2007
‌
US Patent 7298496 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry

Patent 7298496 was granted and assigned to Zetetic Limited on November, 2007 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7298496
November 20, 2007
‌
US Patent 7508527 Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry

Patent 7508527 was granted and assigned to Zetetic Limited on March, 2009 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7508527
March 24, 2009
‌
US Patent 7161680 Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry

Patent 7161680 was granted and assigned to Zetetic Limited on January, 2007 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7161680
January 9, 2007
‌
US Patent 7263259 Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities

Patent 7263259 was granted and assigned to Zetetic Limited on August, 2007 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7263259
August 28, 2007
‌
US Patent 7312877 Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy

Patent 7312877 was granted and assigned to Zetetic Limited on December, 2007 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7312877
December 25, 2007
‌
US Patent 6847029 Multiple-source arrays with optical transmission enhanced by resonant cavities

Patent 6847029 was granted and assigned to Zetetic Limited on January, 2005 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
6847029
January 25, 2005
‌
US Patent 7046372 Transverse differential interferometric confocal microscopy

Patent 7046372 was granted and assigned to Zetetic Limited on May, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7046372
May 16, 2006
‌
US Patent 7084983 Interferometric confocal microscopy incorporating a pinhole array beam-splitter

Patent 7084983 was granted and assigned to Zetetic Limited on August, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7084983
August 1, 2006
‌
US Patent 7054077 Method for constructing a catadioptric lens system

Patent 7054077 was granted and assigned to Zetetic Limited on May, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7054077
May 30, 2006
‌
US Patent 7084984 Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology

Patent 7084984 was granted and assigned to Zetetic Limited on August, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7084984
August 1, 2006
‌
US Patent 7064838 Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry

Patent 7064838 was granted and assigned to Zetetic Limited on June, 2006 by the United States Patent and Trademark Office.

‌
Zetetic Limited
United States Patent and Trademark Office
United States Patent and Trademark Office
7064838
June 20, 2006
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