List of Ultratech patents

Patents where

Current Assignee

Name

‌

Ultratech

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 6898306 Machine-independent alignment system and method	Patent 6898306 was granted and assigned to Ultratech on May, 2005 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	6898306	May 24, 2005
‌ US Patent 7095904 Method and apparatus for determining best focus using dark-field imaging	Patent 7095904 was granted and assigned to Ultratech on August, 2006 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7095904	August 22, 2006
‌ US Patent 7763828 Laser thermal processing with laser diode radiation	Patent 7763828 was granted and assigned to Ultratech on July, 2010 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7763828	July 27, 2010
‌ US Patent 7482254 Apparatus and methods for thermally processing undoped and lightly doped substrates without pre-heating	Patent 7482254 was granted and assigned to Ultratech on January, 2009 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7482254	January 27, 2009
‌ US Patent 7253376 Methods and apparatus for truncating an image formed with coherent radiation	Patent 7253376 was granted and assigned to Ultratech on August, 2007 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7253376	August 7, 2007
‌ US Patent 7292616 CO	Patent 7292616 was granted and assigned to Ultratech on November, 2007 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7292616	November 6, 2007
‌ US Patent 8014427 Line imaging systems and methods for laser annealing	Patent 8014427 was granted and assigned to Ultratech on September, 2011 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	8014427	September 6, 2011
‌ US Patent 7176405 Heat shield for thermal processing	Patent 7176405 was granted and assigned to Ultratech on February, 2007 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7176405	February 13, 2007
‌ US Patent 8691598 Dual-loop control for laser annealing of semiconductor wafers	Patent 8691598 was granted and assigned to Ultratech on April, 2014 by the United States Patent and Trademark Office.	‌ Ultratech	‌ Ultratech	United States Patent and Trademark Office	8691598	April 8, 2014
‌ US Patent 9302348 Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication	Patent 9302348 was granted and assigned to Ultratech on April, 2016 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	9302348	April 5, 2016
‌ US Patent 7612372 Method and system for laser thermal processing of semiconductor devices	Patent 7612372 was granted and assigned to Ultratech on November, 2009 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7612372	November 3, 2009
‌ US Patent 7494942 Laser thermal annealing of lightly doped silicon substrates	Patent 7494942 was granted and assigned to Ultratech on February, 2009 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7494942	February 24, 2009
‌ US Patent 7148159 Laser thermal annealing of lightly doped silicon substrates	Patent 7148159 was granted and assigned to Ultratech on December, 2006 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7148159	December 12, 2006
‌ US Patent 7098155 Laser thermal annealing of lightly doped silicon substrates	Patent 7098155 was granted and assigned to Ultratech on August, 2006 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7098155	August 29, 2006
‌ US Patent 8986562 Methods of laser processing photoresist in a gaseous environment	Patent 8986562 was granted and assigned to Ultratech on March, 2015 by the United States Patent and Trademark Office.	‌ Ultratech	‌ Ultratech	United States Patent and Trademark Office	8986562	March 24, 2015
‌ US Patent 10090153 Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations	Patent 10090153 was granted and assigned to Ultratech on October, 2018 by the United States Patent and Trademark Office.	‌ Ultratech	‌ Ultratech	United States Patent and Trademark Office	10090153	October 2, 2018
‌ US Patent 7514305 Apparatus and methods for improving the intensity profile of a beam image used to process a substrate	Patent 7514305 was granted and assigned to Ultratech on April, 2009 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7514305	April 7, 2009
‌ US Patent 7433051 Determination of lithography misalignment based on curvature and stress mapping data of substrates	Patent 7433051 was granted and assigned to Ultratech on October, 2008 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7433051	October 7, 2008
‌ US Patent 8067305 Electrically conductive structure on a semiconductor substrate formed from printing	Patent 8067305 was granted and assigned to Ultratech on November, 2011 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	8067305	November 29, 2011
‌ US Patent 10316406 Methods of forming an ALD-inhibiting layer using a self-assembled monolayer	Patent 10316406 was granted and assigned to Ultratech on June, 2019 by the United States Patent and Trademark Office.	‌ Ultratech	‌ Ultratech	United States Patent and Trademark Office	10316406	June 11, 2019
‌ US Patent 7145104 Silicon layer for uniformizing temperature during photo-annealing	Patent 7145104 was granted and assigned to Ultratech on December, 2006 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7145104	December 5, 2006
‌ US Patent 9490128 Non-melt thin-wafer laser thermal annealing methods	Patent 9490128 was granted and assigned to Ultratech on November, 2016 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	9490128	November 8, 2016
‌ US Patent 8017424 Dual-sided substrate measurement apparatus and methods	Patent 8017424 was granted and assigned to Ultratech on September, 2011 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	8017424	September 13, 2011
‌ US Patent 7154066 Laser scanning apparatus and methods for thermal processing	Patent 7154066 was granted and assigned to Ultratech on December, 2006 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7154066	December 26, 2006
‌ US Patent 7399945 Method of thermal processing a substrate with direct and redirected reflected radiation	Patent 7399945 was granted and assigned to Ultratech on July, 2008 by the United States Patent and Trademark Office.		‌ Ultratech	United States Patent and Trademark Office	7399945	July 15, 2008

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