List of Nanometrics patents

Patents where

Current Assignee

Name

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Nanometrics

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7295314 Metrology/inspection positioning system	Patent 7295314 was granted and assigned to Nanometrics on November, 2007 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7295314	November 13, 2007
‌ US Patent 7230705 Alignment target with designed in offset	Patent 7230705 was granted and assigned to Nanometrics on June, 2007 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7230705	June 12, 2007
‌ US Patent 9958327 Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device	Patent 9958327 was granted and assigned to Nanometrics on May, 2018 by the United States Patent and Trademark Office.	‌ Nanometrics	‌ Nanometrics	United States Patent and Trademark Office	9958327	May 1, 2018
‌ US Patent 7594438 Inertial sensor having a flexing element supporting a movable mass	Patent 7594438 was granted and assigned to Nanometrics on September, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7594438	September 29, 2009
‌ US Patent 10274367 Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device	Patent 10274367 was granted and assigned to Nanometrics on April, 2019 by the United States Patent and Trademark Office.	‌ Nanometrics	‌ Nanometrics	United States Patent and Trademark Office	10274367	April 30, 2019
‌ US Patent 7433034 Darkfield defect inspection with spectral contents	Patent 7433034 was granted and assigned to Nanometrics on October, 2008 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7433034	October 7, 2008
‌ US Patent 7362448 Characterizing residue on a sample	Patent 7362448 was granted and assigned to Nanometrics on April, 2008 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7362448	April 22, 2008
‌ US Patent 8126694 Modeling conductive patterns using an effective model	Patent 8126694 was granted and assigned to Nanometrics on February, 2012 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	8126694	February 28, 2012
‌ US Patent 7446321 Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece	Patent 7446321 was granted and assigned to Nanometrics on November, 2008 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7446321	November 4, 2008
‌ US Patent 7301623 Transferring, buffering and measuring a substrate in a metrology system	Patent 7301623 was granted and assigned to Nanometrics on November, 2007 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7301623	November 27, 2007
‌ US Patent 7469164 Method and apparatus for process control with in-die metrology	Patent 7469164 was granted and assigned to Nanometrics on December, 2008 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7469164	December 23, 2008
‌ US Patent 7202958 Modeling a sample with an underlying complicated structure	Patent 7202958 was granted and assigned to Nanometrics on April, 2007 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7202958	April 10, 2007
‌ US Patent 7589834 Detection method and apparatus metal particulates on semiconductors	Patent 7589834 was granted and assigned to Nanometrics on September, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7589834	September 15, 2009
‌ US Patent 7639371 Line profile asymmetry measurement	Patent 7639371 was granted and assigned to Nanometrics on December, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7639371	December 29, 2009
‌ US Patent 7515279 Line profile asymmetry measurement	Patent 7515279 was granted and assigned to Nanometrics on April, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7515279	April 7, 2009
‌ US Patent 7504642 Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece	Patent 7504642 was granted and assigned to Nanometrics on March, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7504642	March 17, 2009
‌ US Patent 7556725 Sealing ring assembly and mounting method	Patent 7556725 was granted and assigned to Nanometrics on July, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7556725	July 7, 2009
‌ US Patent 7446868 Micro defects in semi-conductors	Patent 7446868 was granted and assigned to Nanometrics on November, 2008 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7446868	November 4, 2008
‌ US Patent 9547244 Simultaneous measurement of multiple overlay errors using diffraction based overlay	Patent 9547244 was granted and assigned to Nanometrics on January, 2017 by the United States Patent and Trademark Office.	‌ Nanometrics	‌ Nanometrics	United States Patent and Trademark Office	9547244	January 17, 2017
‌ US Patent 7502101 Apparatus and method for enhanced critical dimension scatterometry	Patent 7502101 was granted and assigned to Nanometrics on March, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7502101	March 10, 2009
‌ US Patent 7511293 Scatterometer having a computer system that reads data from selected pixels of the sensor array	Patent 7511293 was granted and assigned to Nanometrics on March, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7511293	March 31, 2009
‌ US Patent 7492467 Method and apparatus for measuring thickness and optical properties of a thin-film on a substrate	Patent 7492467 was granted and assigned to Nanometrics on February, 2009 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7492467	February 17, 2009
‌ US Patent 8259297 Scanning focal length metrology	Patent 8259297 was granted and assigned to Nanometrics on September, 2012 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	8259297	September 4, 2012
‌ US Patent 7289215 Image control in a metrology/inspection positioning system	Patent 7289215 was granted and assigned to Nanometrics on October, 2007 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7289215	October 30, 2007
‌ US Patent 7385873 Mass positioning adjustment mechanism for a seismic sensor	Patent 7385873 was granted and assigned to Nanometrics on June, 2008 by the United States Patent and Trademark Office.		‌ Nanometrics	United States Patent and Trademark Office	7385873	June 10, 2008

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