US Patent 9810901 Apparatus and method for driving and measuring a MEMS mirror system
Patent 9810901 was granted and assigned to TriLite Technologies on November, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 22, 2015
Date of Patent
November 7, 2017
Patent Application Number
14692985
Patent Inventor Names
Joerg Reitterer
0
Christian Hambeck
0
Franz Fidler
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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