Patent attributes
A first sacrificial gate structure is formed over a first fin stack and a second sacrificial gate structure is formed over a second fin stack. The first and second fin stacks include alternating layers of a III-V compound semiconductor material portion and a germanium material portion. Source/drain structures are formed adjacent the first and second sacrificial gate structures. The first sacrificial structure is removed to provide a first gate cavity. Exposed III-V compound semiconductor portions in the first gate cavity are removed to suspend a portion of each germanium material portion. A first functional gate structure is formed in the first gate cavity. The second sacrificial structure is removed to provide a second gate cavity. Exposed germanium material portions are removed to suspend a portion of each III-V compound semiconductor material portion of the second fin stack. A second functional gate structure is formed in the second gate cavity.
