US Patent 9378992 High throughput heated ion implantation system and method
Patent 9378992 was granted and assigned to Axcelis Technologies on June, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 27, 2014
Date of Patent
June 28, 2016
Patent Applicant
Patent Application Number
14317778
Patent Citations Received
Patent Inventor Names
Armin Huseinovic
0
Brian Terry
0
Joseph Ferrara
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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