Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 10, 2016
Patent Application Number
14602447
Date Filed
January 22, 2015
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
An apparatus for evaluating the quality of a crystal includes an optical device that measures a surface reflectance of a wafer in which a V-pit is formed; and a data processing unit that calculates a threading dislocation density by calculating a difference in surface reflectance of the wafer that is measured by the optical device.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
