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US Patent 9000584 Packaged semiconductor device with a molding compound and a method of forming the same

Patent 9000584 was granted and assigned to Taiwan Semiconductor Manufacturing Company on April, 2015 by the United States Patent and Trademark Office.

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Patent

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Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9000584
Date of Patent
April 7, 2015
Patent Application Number
13338820
Date Filed
December 28, 2011
Patent Citations Received
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US Patent 12136593 Electronic apparatus including antennas and directors
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US Patent 12131965 Apparatus for detecting end point
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US Patent 12132024 Semiconductor package and method of manufacturing the same
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US Patent 12132247 Semiconductor package and manufacturing method thereof
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US Patent 11658134 Inductor structure, semiconductor package and fabrication method thereof
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US Patent 11658105 Semiconductor package and manufacturing method thereof
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US Patent 11658392 Package structure
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US Patent 11658097 Manufacturing method for semiconductor device including through die hole
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...
Patent Primary Examiner
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Tammy Thanh Nguyen
Patent abstract

The mechanisms of forming a molding compound on a semiconductor device substrate to enable fan-out structures in wafer-level packaging (WLP) are provided. The mechanisms involve covering portions of surfaces of an insulating layer surrounding a contact pad. The mechanisms improve reliability of the package and process control of the packaging process. The mechanisms also reduce the risk of interfacial delamination, and excessive outgassing of the insulating layer during subsequent processing. The mechanisms further improve planarization end-point. By utilizing a protective layer between the contact pad and the insulating layer, copper out-diffusion can be reduced and the adhesion between the contact pad and the insulating layer may also be improved.

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