US Patent 7907037 Micro-electro-mechanical module
Patent 7907037 was granted and assigned to Evigia Systems on March, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 5, 2007
Date of Patent
March 15, 2011
Patent Application Number
11671130
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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