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US Patent 7538470 Monolithic nanoscale actuation

Patent 7538470 was granted and assigned to Zyvex Labs on May, 2009 by the United States Patent and Trademark Office.

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Current Assignee
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Zyvex Labs
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7538470
Date of Patent
May 26, 2009
Patent Application Number
11422229
Date Filed
June 5, 2006
Patent Primary Examiner
‌
Quyen P Leung
Patent abstract

An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions.

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