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US Patent 7307003 Method of forming a multi-layer semiconductor structure incorporating a processing handle member

Patent 7307003 was granted and assigned to Massachusetts Institute of Technology on December, 2007 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
Massachusetts Institute of Technology
Massachusetts Institute of Technology
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7307003
Patent Inventor Names
Kuan-Neng Chen0
Andy Fan0
Chuan Seng Tan0
Rafael Reif0
Date of Patent
December 11, 2007
Patent Application Number
10749103
Date Filed
December 30, 2003
Patent Citations Received
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US Patent 12062700 Gallium-nitride-based module with enhanced electrical performance and process for making the same
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US Patent 12074086 RF devices with nanotube particles for enhanced performance and methods of forming the same
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US Patent 12080683 RF devices with enhanced performance and methods of forming the same
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US Patent 12112999 RF devices with enhanced performance and methods of forming the same
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US Patent 12125739 RF devices with enhanced performance and methods of forming the same utilizing localized SOI formation
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US Patent 12125825 RF devices with enhanced performance and methods of forming the same
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...
Patent Primary Examiner
‌
David A Zarneke
Patent abstract

A method of forming a multi-layer semiconductor structure includes attaching a handle-member to a top surface of a first structure using a first interface. At least one region of a bottom surface of the first structure is etched to form at least a first via-hole for exposing a portion of a first conductive member defined on the first structure. A conductive material is disposed in the first via-hole such that a first end of the conductive material is in electrical communication with the first conductive member and a second end of the conductive material is exposed at the bottom surface of the first structure. A second interface is disposed over at least the second end of the conductive material, which serves as a bonding and/or electrical interface between the first conductive member defined on the first structure and a second structure of the multi-layer semiconductor device structure.

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