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US Patent 12136600 Grounded metal ring structure for through-silicon via

Patent 12136600 was granted and assigned to Taiwan Semiconductor Manufacturing Company on November, 2024 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
121366000
Patent Inventor Names
Cheng-Chien Li0
Kun-Hsiang Lin0
Shih-Chang Chen0
Date of Patent
November 5, 2024
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Patent Application Number
174688860
Date Filed
September 8, 2021
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Patent Citations
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US Patent 9171929 Strained structure of semiconductor device and method of making the strained structure
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US Patent 9214555 Barrier layer for FinFET channels
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US Patent 9236267 Cut-mask patterning process for fin-like field effect transistor (FinFET) device
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US Patent 9236300 Contact plugs in SRAM cells and the method of forming the same
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US Patent 9406804 FinFETs with contact-all-around
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US Patent 9443769 Wrap-around contact
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US Patent 9520482 Method of cutting metal gate
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US Patent 9548303 FinFET devices with unique fin shape and the fabrication thereof
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...
Patent Primary Examiner
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Peniel M Gumedzoe
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CPC Code
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H01L 23/5286
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H01L 23/481
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H01L 23/585
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Patent abstract

The present disclosure describes a semiconductor structure including a TSV in contact with a substrate and a metal ring structure laterally surrounding the TSV. The metal ring structure includes one or more metal rings arranged as a stack and one or more metal vias interposed between two adjacent metal rings of the one or more metal rings. The metal ring structure is electrically coupled to the substrate through one or more conductive structures.

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